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TS2000-IFE

Wafer Probe System by MPI Corporation (24 more products)
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Product Specifications

Product Details

  • Part Number
    TS2000-IFE
  • Manufacturer
    MPI Corporation

General Parameters

  • Accuracy
    2 µm
  • Chuck Size
    220 x 490 mm
  • Net Weight
    800 kg
  • Overall Dimensions
    1210 x 1190 x 1570 mm
  • Planarity
    5 µm
  • Power Supply
    100-240 V AC 50/60 Hz
  • Repeatability
    1 µm
  • Resolution
    0.2 µm
  • Theta Movement
    5 Degree
  • Theta Stage Accuracy
    2.0 µm
  • Theta Stage Repeatabilty
    1 µm
  • Theta Stage Resolution
    0.0001 Degree
  • Type
    Automatic
  • Vacuum
    -0.9 bar
  • Wafer Size
    Up to 200 mm
  • XY Moving Speed
    50 mm/sec, 20 mm/sec (Z Stage)
  • Z Accuracy
    2 µm
  • Z Repeatability
    1 µm
  • Z Resolution
    0.2 µm
  • Z Travel Area
    30 mm

Technical Documents
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