TS300

Wafer Probe System by MPI Corporation (24 more products)

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Product Specifications

Product Details

  • Part Number
    TS300
  • Manufacturer
    MPI Corporation

General Parameters

  • Chuck Size
    330 x 395 mm
  • Net Weight
    95 kg
  • Overall Dimensions
    870 x 745 x 660 mm
  • Planarity
    10 µm
  • Power Supply
    100-240 V AC 50/60 Hz, 460 W
  • Resolution
    1 µm
  • Theta Movement
    5 Degree
  • Theta Stage Resolution
    7.5 x 10-3 gradient
  • Type
    Manual
  • Vacuum
    -0.3 bar
  • Wafer Size
    300 mm

Technical Documents