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TS3000-SE

Wafer Probe System by MPI Corporation (24 more products)
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Product Specifications

Product Details

  • Part Number
    TS3000-SE
  • Manufacturer
    MPI Corporation

General Parameters

  • Accuracy
    2 µm
  • Chuck Size
    310 x 335 mm
  • Net Weight
    830 kg
  • Overall Dimensions
    1400 x 1115 x 1550 mm
  • Planarity
    5 µm
  • Power Supply
    100-240 V AC 50/60 Hz, 460 W
  • Repeatability
    1 µm
  • Resolution
    0.5 µm
  • Theta Movement
    5 Degree
  • Theta Stage Accuracy
    2.0 µm
  • Theta Stage Repeatabilty
    1 µm
  • Theta Stage Resolution
    0.0001 Degree
  • Type
    Automatic
  • Vacuum
    -0.9 bar
  • XY Moving Speed
    50 mm/sec, 20 mm/sec (Z Stage)
  • Z Accuracy
    2 µm
  • Z Repeatability
    1 µm
  • Z Resolution
    0.2 µm
  • Z Travel Area
    30 mm

Technical Documents
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