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TS3500-IFE

Wafer Probe System by MPI Corporation (24 more products)
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Product Specifications

Product Details

  • Part Number
    TS3500-IFE
  • Manufacturer
    MPI Corporation

General Parameters

  • Accuracy
    2 µm
  • Chuck Size
    310 x 530 mm
  • Net Weight
    850 kg
  • Overall Dimensions
    1400 x 1315 x 1600 mm
  • Planarity
    5 µm
  • Power Supply
    100-240 V AC 50/60 Hz, 460 W
  • Repeatability
    2 µm
  • Resolution
    0.5 µm
  • Theta Movement
    5 Degree
  • Theta Stage Accuracy
    2.0 µm
  • Theta Stage Repeatabilty
    1 µm
  • Theta Stage Resolution
    0.0001 Degree
  • Type
    Automatic
  • Vacuum
    -0.9 bar
  • Wafer Size
    150 mm, 200 mm, 300 mm
  • XY Moving Speed
    50 mm/sec
  • Z Accuracy
    2 µm
  • Z Repeatability
    1 µm
  • Z Resolution
    0.2 µm
  • Z Travel Area
    30 mm

Technical Documents
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