OPUS3 SLT

Wafer Probe System by SEMICS Inc (7 more products)

Note : Your request will be directed to SEMICS Inc.

Product Specifications

Product Details

  • Part Number
    OPUS3 SLT
  • Manufacturer
    SEMICS Inc

General Parameters

  • Accuracy
    1.5 µm
  • Chuck Size
    175 x 200 mm
  • Operating Temperature
    -40 to 200 Degree C
  • Overall Dimensions
    1485 x 1720 x 960 mm
  • Probing Force
    230 kgf
  • Type
    Automatic
  • Wafer Size
    8 Inches, 12 Inches

Technical Documents