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A8

Wafer Probe System by Semishare Co., Ltd (14 more products)
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Product Specifications

Product Details

  • Part Number
    A8
  • Manufacturer
    Semishare Co., Ltd

General Parameters

  • Chuck Size
    260 x 450 mm
  • Die Size
    300 to 100000 µm
  • Net Weight
    1200 kg
  • Overall Dimensions
    1124 x 1111 x 925 mm
  • Power Supply
    AC 220V, 50/60 Hz
  • Repeatability
    1 µm
  • Resolution
    0.1 µm
  • Theta Movement
    10 Degree
  • Theta Stage Accuracy
    0.00001 Degree
  • Type
    Automatic
  • Vacuum
    -70 to 90 Kpa
  • Wafer Size
    6 Inches, 8 Inches
  • XY Moving Speed
    200 mm/sec
  • Z Repeatability
    1 µm
  • Z Resolution
    0.1 µm
  • Z Travel Area
    0 to 80 mm

Technical Documents
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