X6

Wafer Probe System by Semishare Co., Ltd (14 more products)

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Product Specifications

Product Details

  • Part Number
    X6
  • Manufacturer
    Semishare Co., Ltd

General Parameters

  • Chuck Size
    350 x 365 mm
  • Net Weight
    1500 kg
  • Operating Temperature
    -60 to 300 Degree C
  • Overall Dimensions
    1060 x 1610 x 1500 mm
  • Repeatability
    1 µm
  • Resolution
    0.1 µm
  • Type
    Semi Automatic
  • Wafer Size
    6 Inches, 8 Inches, 12 Inches
  • XY Moving Speed
    700 mm/sec
  • Z Repeatability
    1 µm
  • Z Travel Area
    20 mm

Technical Documents