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Prodigy

Thin Film Deposition Equipment by Beneq, Inc (9 more products)
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Product Specifications

Product Details

  • Part Number
    Prodigy
  • Manufacturer
    Beneq, Inc

General Parameters

  • ALD Processes
    Al2O3, TiO2, SiO2 and others
  • Batch Size
    Up to 25 x 200 mm wafers, 50 x 150 mm wafers, 75 x 100 mm wafers
  • Integration
    Stand-Alone, SECS/GEM, SEMI S2 Compliant
  • Overall Dimensions
    3320 x 910 x 2400 mm
  • Safety Standards
    SEMI S2
  • Temperature Range
    420 Degree C
  • Throughput
    >14 wafers/hour, 50 pcs 150 mm wafer batch
  • Type
    ALD Process
  • VCE Loadlocks
    1
  • Wafer Size
    75 mm, 100 mm, 150 mm, 200 mm

Technical Documents
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