ATM-8100 Series

Wafer Mounting Equipment by Toyo Adtec Co., Ltd (4 more products)

Note : Your request will be directed to Toyo Adtec Co., Ltd.

ATM-8100 Series Image

Product Specifications

Product Details

  • Part Number
    ATM-8100 Series
  • Manufacturer
    Toyo Adtec Co., Ltd

General Parameters

  • Air Supply
    0.4 to 0.5 Mpa 300 N1/min
  • Frame Size
    6 Inches, 8 Inches
  • Membrane Width
    230 mm, 300 mm
  • Power Supply
    AC200V Single phase 50/60 Hz 6.0 KVA
  • Type
    Automatic
  • Wafer Size
    5 Inches, 6 Inches, 8 Inches
  • Wafer Thickness
    150 µm

Technical Documents