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Zenith-150

Thin Film Deposition Equipment by Annealsys (2 more products)
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Product Specifications

Product Details

  • Part Number
    Zenith-150
  • Manufacturer
    Annealsys

General Parameters

  • ALD Processes
    DLI-CVD, DLI-ALD
  • Compressed Air
    6 bar
  • Net Weight
    500 kg
  • Overall Dimensions
    1750 x 800 x 2000 mm
  • Power Supply
    3x400V+N+Gr, 3x220V+Gr, 38 kW
  • Temperature Range
    450 to 2000 Degree C
  • Type
    ALD Process, CVD Process
  • Uniform Gas
    Up to 8 Gas Lines
  • Wafer Size
    Up to 150 mm
  • Water
    2 to 4 bar, 1 bar, 15 l/mn

Technical Documents
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