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Ultra C we

Wafer Etching System by ACM Research
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Product Specifications

Product Details

  • Part Number
    Ultra C we
  • Manufacturer
    ACM Research

General Parameters

  • Number Of Chambers
    1 to 5 sets
  • Process Type
    Wet Etching
  • Wafer Size
    8 Inches, 12 Inches
  • Note
    Flow Rate - +/- 0.3 LPM

Technical Documents