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ATM-8200A

Wafer Mounting Equipment by Takatori Corporation
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Product Specifications

Product Details

  • Part Number
    ATM-8200A
  • Manufacturer
    Takatori Corporation

General Parameters

  • Air Supply
    0.5 Mpa 300 Nl/min
  • Efficiency
    95 wafer/h
  • Frame Size
    2 - 6 - 1, 2 - 8 - 1
  • Membrane Width
    230 mm, 300 mm
  • Net Weight
    700 kg
  • Overall Dimensions
    1326 x 1150 x 1800 mm
  • Power Supply
    AC 100 V 50/60 Hz 2.0 KVA
  • Type
    Automatic
  • Wafer Size
    4 Inches, 5 Inches, 6 Inches, 8 Inches
  • Wafer Thickness
    200 µm

Technical Documents
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