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Vi-5301M

Wafer Automated Optical Inspection (AOI) Equipment by Takano Co.,Ltd (4 more products)
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Product Specifications

Product Details

  • Part Number
    Vi-5301M
  • Manufacturer
    Takano Co.,Ltd

General Parameters

  • Defect Size
    1.2 µm, 2.4 µm, 5 µm
  • Defects
    Foreign Material, Chipping, Crack, Residue, Bumo Failure
  • Light Source
    Coxial, Ring, Under Light
  • Magnification
    10X, 5X, 2.5X
  • Net Weight
    2800 kg
  • Overall Dimensions
    2600 x 1440 x 1790 mm
  • Resolution
    15 µm, 10 µm, 5 µm, 3 µm
  • Type
    Pattern Inspection System
  • Wafer Size
    300 mm

Technical Documents
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