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Wafer Probe System - Page 6

124 Wafer Probe System from 18 Manufacturers meet your specification.
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MicroXact Inc - SPS-2800

Wafer Probe System from MicroXact Inc
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Chuck Flatness:
13 µm
Chuck Size:
200 x 200 mm
Magnification:
3.5 to 180X
Net Weight:
95 kg
Overall Dimensions:
1220 x 1220 x 920 mm
Planarity:
12.7 µm
Platen Travel Size:
12.7 mm
Power Supply:
110 VAC, 15 A or 220 VAC, 10 A
Probe Rotation:
360 Degree
Resolution:
1.5 µm
Theta Movement:
6 Degree
Type:
Semi Automatic
Wafer Size:
Up to 200 mm
XY Moving Speed:
9.5 mm/sec
Z Resolution:
400 nm
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MPI Corporation - TS150

Wafer Probe System from MPI Corporation
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Chuck Size:
180 x 230 mm
Net Weight:
60 kg
Overall Dimensions:
470 x 590 x 590 mm
Planarity:
10 µm
Power Supply:
100-240 V AC 50/60 Hz, 460 W
Resolution:
1 µm
Theta Movement:
5 Degree
Theta Stage Resolution:
7.5 x 10-3 gradient
Type:
Manual
Vacuum:
-0.3 bar
Wafer Size:
150 mm
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MPI Corporation - TS150-AIT

Wafer Probe System from MPI Corporation
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Chuck Size:
180 x 300 mm
Mounting Movement:
50 x 50 mm, 80 x 80 mm
Net Weight:
120 kg
Overall Dimensions:
670 x 680 x 710 mm
Planarity:
10 µm
Power Supply:
100-240 V AC 50/60 Hz
Resolution:
1 µm
Theta Movement:
5 Degree
Theta Stage Resolution:
7.5 x 10-3 gradient
Type:
Manual
Vacuum:
-0.3 bar
Wafer Size:
150 mm
Z Resolution:
1 µm
Z Travel Area:
10 mm
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MPI Corporation - TS150-HP

Wafer Probe System from MPI Corporation
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Chuck Size:
180 x 230 mm
Mounting Movement:
25 x 25 mm
Net Weight:
190 kg
Overall Dimensions:
900 x 800 x 1730 mm
Planarity:
10 µm
Power Supply:
100-240 V AC 50/60 Hz
Resolution:
1 µm
Theta Movement:
5 Degree
Theta Stage Resolution:
7.5 x 10-3 gradient
Type:
Manual
Vacuum:
-0.3 bar
Wafer Size:
50 mm
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MPI Corporation - TS150-THZ

Wafer Probe System from MPI Corporation
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Chuck Size:
180 x 300 mm
Mounting Movement:
50 x 50 mm
Net Weight:
120 kg
Overall Dimensions:
670 x 680 x 690 mm
Planarity:
10 µm
Power Supply:
100-240 V AC 50/60 Hz
Resolution:
1 µm
Theta Movement:
5 Degree
Theta Stage Resolution:
7.5 x 10-3 gradient
Type:
Manual
Vacuum:
-0.3 bar
Wafer Size:
150 mm
Z Resolution:
1 µm
Z Travel Area:
10 mm
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MPI Corporation - TS200

Wafer Probe System from MPI Corporation
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Chuck Size:
240 x 315 mm
Net Weight:
88 kg
Overall Dimensions:
690 x 665 x 480 mm
Planarity:
10 µm
Power Supply:
100-240 V AC 50/60 Hz, 460 W
Resolution:
1 µm
Theta Movement:
5 Degree
Theta Stage Resolution:
7.5 x 10-3 gradient
Type:
Manual
Vacuum:
-0.3 bar
Wafer Size:
200 mm
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MPI Corporation - TS200-HP

Wafer Probe System from MPI Corporation
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Chuck Size:
225 x 260 mm
Mounting Movement:
50 x 50 mm
Net Weight:
500 kg
Overall Dimensions:
900 x 1090 x 1910 mm
Planarity:
10 µm
Power Supply:
100-240 V AC 50/60 Hz
Resolution:
1 µm
Theta Movement:
5 Degree
Theta Stage Resolution:
7.5 x 10-3 gradient
Type:
Manual
Vacuum:
-0.3 bar
Wafer Size:
100 mm, 200 mm
Z Resolution:
1 µm
Z Travel Area:
5 mm
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MPI Corporation - TS200-SE

Wafer Probe System from MPI Corporation
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Chuck Size:
225 x 260 mm
Mounting Movement:
50 x 50 mm
Net Weight:
150 kg
Overall Dimensions:
670 x 785 x 815 mm
Planarity:
10 µm
Power Supply:
100-240 V AC 50/60 Hz
Resolution:
1 µm
Theta Movement:
5 Degree
Theta Stage Resolution:
7.5 x 10-3 gradient
Type:
Manual
Vacuum:
-0.3 bar
Wafer Size:
200 mm
Z Resolution:
1 µm
Z Travel Area:
5 mm
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MPI Corporation - TS200-THZ

Wafer Probe System from MPI Corporation
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Chuck Size:
255 x 325 mm
Mounting Movement:
50 x 50 mm, 80 x 80 mm
Net Weight:
135 kg
Overall Dimensions:
670 x 680 x 695 mm
Planarity:
10 µm
Power Supply:
100-240 V AC 50/60 Hz
Resolution:
1 µm
Theta Movement:
5 Degree
Theta Stage Resolution:
7.5 x 10-3 gradient
Type:
Manual
Vacuum:
-0.3 bar
Wafer Size:
200 mm
Z Resolution:
1 µm
Z Travel Area:
10 mm
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MPI Corporation - TS2000

Wafer Probe System from MPI Corporation
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Accuracy:
4 µm
Chuck Size:
210 x 340 mm
Net Weight:
500 kg
Overall Dimensions:
890 x 1105 x 1250 mm
Planarity:
5 µm
Power Supply:
100-240 V AC 50/60 Hz
Repeatability:
1 µm
Resolution:
0.1 µm
Theta Movement:
5 Degree
Theta Stage Accuracy:
3.0 µm
Theta Stage Repeatabilty:
2.0 µm
Theta Stage Resolution:
0.0004 Degree
Type:
Semi Automatic
Vacuum:
-0.9 bar
Wafer Size:
Up to 200 mm
XY Moving Speed:
100 mm/sec, 30 mm/sec (Z Stage)
Z Accuracy:
2 µm
Z Repeatability:
1 µm
Z Resolution:
0.2 µm
Z Travel Area:
10 mm
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