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Wafer Probe System - Page 8

124 Wafer Probe System from 18 Manufacturers meet your specification.
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MPI Corporation - TS3000-IFE

Wafer Probe System from MPI Corporation
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Accuracy:
2 µm
Chuck Size:
310 x 335 mm
Net Weight:
850 kg
Overall Dimensions:
1400 x 1115 x 1550 mm
Planarity:
5 µm
Power Supply:
100-240 V AC 50/60 Hz, 460 W
Repeatability:
1 µm
Resolution:
0.5 µm
Theta Movement:
5 Degree
Theta Stage Accuracy:
2.0 µm
Theta Stage Repeatabilty:
1 µm
Theta Stage Resolution:
0.0001 Degree
Type:
Automatic
Vacuum:
-0.9 bar
Wafer Size:
Up to 300 mm
XY Moving Speed:
50 mm/sec, 20 mm/sec (Z Stage)
Z Accuracy:
2 µm
Z Repeatability:
1 µm
Z Resolution:
0.2 µm
Z Travel Area:
30 mm
more info
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MPI Corporation - TS3000-SE

Wafer Probe System from MPI Corporation
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Accuracy:
2 µm
Chuck Size:
310 x 335 mm
Net Weight:
830 kg
Overall Dimensions:
1400 x 1115 x 1550 mm
Planarity:
5 µm
Power Supply:
100-240 V AC 50/60 Hz, 460 W
Repeatability:
1 µm
Resolution:
0.5 µm
Theta Movement:
5 Degree
Theta Stage Accuracy:
2.0 µm
Theta Stage Repeatabilty:
1 µm
Theta Stage Resolution:
0.0001 Degree
Type:
Automatic
Vacuum:
-0.9 bar
XY Moving Speed:
50 mm/sec, 20 mm/sec (Z Stage)
Z Accuracy:
2 µm
Z Repeatability:
1 µm
Z Resolution:
0.2 µm
Z Travel Area:
30 mm
more info
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MPI Corporation - TS3500

Wafer Probe System from MPI Corporation
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Accuracy:
2 µm
Chuck Size:
310 x 530 mm
Mounting Movement:
50 x 50 mm
Net Weight:
850 kg
Overall Dimensions:
1400 x 1315 x 1670 mm
Planarity:
5 µm
Power Supply:
100-240 V AC 50/60 Hz, 460 W
Repeatability:
2 µm
Resolution:
0.5 µm
Theta Movement:
5 Degree
Theta Stage Accuracy:
2.0 µm
Theta Stage Repeatabilty:
1 µm
Theta Stage Resolution:
0.0001 Degree
Type:
Automatic
Vacuum:
-0.9 bar
Wafer Size:
150 mm, 200 mm, 300 mm
XY Moving Speed:
50 mm/sec
Z Accuracy:
2 µm
Z Repeatability:
1 µm
Z Resolution:
0.2 µm
Z Travel Area:
30 mm
more info
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MPI Corporation - TS3500-HP

Wafer Probe System from MPI Corporation
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Accuracy:
2 µm
Chuck Size:
305 x 520 mm
Mounting Movement:
50 x 50 mm
Net Weight:
1150 kg
Overall Dimensions:
1400 x 1505 x 1730 mm
Planarity:
5 µm
Power Supply:
100-240 V AC 50/60 Hz
Repeatability:
1 µm
Resolution:
0.5 µm
Theta Movement:
5 Degree
Theta Stage Accuracy:
2.0 µm
Theta Stage Repeatabilty:
1 µm
Theta Stage Resolution:
0.0001 Degree
Type:
Automatic
Vacuum:
-0.9 bar
Wafer Size:
300 mm
XY Moving Speed:
50 mm/sec
Z Accuracy:
2 µm
Z Repeatability:
1 µm
Z Resolution:
0.2 µm
Z Travel Area:
30 mm
more info
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MPI Corporation - TS3500-IFE

Wafer Probe System from MPI Corporation
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Accuracy:
2 µm
Chuck Size:
310 x 530 mm
Net Weight:
850 kg
Overall Dimensions:
1400 x 1315 x 1600 mm
Planarity:
5 µm
Power Supply:
100-240 V AC 50/60 Hz, 460 W
Repeatability:
2 µm
Resolution:
0.5 µm
Theta Movement:
5 Degree
Theta Stage Accuracy:
2.0 µm
Theta Stage Repeatabilty:
1 µm
Theta Stage Resolution:
0.0001 Degree
Type:
Automatic
Vacuum:
-0.9 bar
Wafer Size:
150 mm, 200 mm, 300 mm
XY Moving Speed:
50 mm/sec
Z Accuracy:
2 µm
Z Repeatability:
1 µm
Z Resolution:
0.2 µm
Z Travel Area:
30 mm
more info
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MPI Corporation - TS3500-SE

Wafer Probe System from MPI Corporation
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Accuracy:
2 µm
Chuck Size:
310 x 530 mm
Net Weight:
1020 kg
Overall Dimensions:
1400 x 1315 x 1670 mm
Planarity:
5 µm
Power Supply:
100-240 V AC 50/60 Hz, 460 W
Repeatability:
2 µm
Resolution:
0.5 µm
Theta Movement:
5 Degree
Theta Stage Accuracy:
2.0 µm
Theta Stage Repeatabilty:
1 µm
Theta Stage Resolution:
0.0001 Degree
Type:
Automatic
Vacuum:
-0.9 bar
Wafer Size:
150 mm, 200 mm, 300 mm
XY Moving Speed:
50 mm/sec
Z Accuracy:
2 µm
Z Repeatability:
1 µm
Z Resolution:
0.2 µm
Z Travel Area:
30 mm
more info
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Pegasus Instrument Inc - PG2101

Wafer Probe System from Pegasus Instrument Inc
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Accuracy:
7 µm
Chuck Size:
210 x 265 mm
Net Weight:
400 Kg
Overall Dimensions:
840 x 1000 x 1570 mm
Power Supply:
100-240VAC, 47/63 Hz, 10A
Repeatability:
4 µm
Resolution:
0.5 µm
Theta Movement:
10 Degree
Theta Stage Resolution:
0.001 Degree
Type:
Semi Automatic
Vacuum:
0.5 CFM at 20 inches Hg
Wafer Size:
4 to 6 Inches
Z Accuracy:
2 µm
Z Repeatability:
4 µm
Z Resolution:
1 µm
Z Travel Area:
0.5 to 7.5 mm
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Plum Five Co., Ltd - PCP-102NT

Wafer Probe System from Plum Five Co., Ltd
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Operating Temperature:
50 to 180 Degree C
Overall Dimensions:
L x 1250 x 860 mm
Type:
Automatic
Wafer Size:
4 to 8 Inches
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Plum Five Co., Ltd - PCP-102SL

Wafer Probe System from Plum Five Co., Ltd
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Chuck Size:
200 mm
Operating Temperature:
50 to 150 Degree C
Overall Dimensions:
1200 x 1860 mm
Type:
Automatic
Wafer Size:
100 to 200 mm
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Plum Five Co., Ltd - PCP-102WS

Wafer Probe System from Plum Five Co., Ltd
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Overall Dimensions:
L x 1200 x 860 mm
Repeatability:
1 µm
Type:
Automatic
Wafer Size:
100 to 200 mm
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