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Wafer Probe System - Page 3

124 Wafer Probe System from 18 Manufacturers meet your specification.
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FormFactor - PM300

Wafer Probe System from FormFactor
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Operating Temperature:
+25 to +200 Degree C
Planarity:
< 5 µm, < +/- 10 µm
Power Supply:
115 / 230 V, 50 / 60 Hz
Resolution:
< 5 µm
Stage Travel Range Fine:
10 x 10 mm
Theta Movement:
8 Degree
Type:
Manual
Vacuum:
- 0.8 bar
Wafer Size:
300 mm
Z Travel Area:
40 mm
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FormFactor - PM8

Wafer Probe System from FormFactor
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Chuck Flatness:
= 8 µm
Chuck Size:
200 mm
Operating Temperature:
+25 to +200 Degree C
Planarity:
= ± 6 µm
Repeatability:
= 2 µm
Resolution:
1 µm
Stage Travel Range Fine:
10 x 10 mm
Theta Movement:
6 Degree
Theta Stage Resolution:
< 6.75 x 10-3
Type:
Manual
Wafer Size:
Up to 200 mm
Z Repeatability:
= 2 µm
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FormFactor - Summit 11000

Wafer Probe System from FormFactor
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Chuck Flatness:
= 8 µm
Chuck Size:
200 mm
Net Weight:
4.5 kg
Operating Temperature:
-60 to 300 Degree C
Overall Dimensions:
745 x 595 x 200 mm
Planarity:
10 µm
Repeatability:
= 3 µm
Resolution:
5 µm
Theta Movement:
5.7 Degree
Theta Stage Resolution:
0.8 Degree / turn
Type:
Manual
Wafer Size:
150 mm, 200 mm
Z Repeatability:
1 µm, 5 µm
more info
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FormFactor - SUMMIT200 AP

Wafer Probe System from FormFactor
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Accuracy:
5 µm (Fast Mode), 2.5 µm (Standard Mode), 2.0 µm (Accurate Mode)
Chuck Size:
203 x 203 mm
Operating Temperature:
-60 to 300 Degree C
Planarity:
20 µm
Probing Force:
20 kg
Repeatability:
3.5 µm (Fast Mode), 2.0 µm (Standard Mode), 1.5 µm (Accurate Mode)
Resolution:
0.2 µm
Theta Movement:
7.5 Degree
Theta Stage Accuracy:
2 µm, 3 µm
Theta Stage Repeatabilty:
1.5 µm
Theta Stage Resolution:
0.5 µm
Type:
Semi Automatic
Wafer Size:
200 mm
XY Moving Speed:
Up to 100 mm/sec
Z Repeatability:
1 µm
Z Resolution:
1 µm
Z Travel Area:
35 mm
more info
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FormFactor - SUMMIT200 M

Wafer Probe System from FormFactor
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Accuracy:
5 µm (Fast Mode), 2.5 µm (Standard Mode), 2.0 µm (Accurate Mode)
Chuck Size:
203 x 203 mm
Operating Temperature:
-60 to 300 Degree C
Planarity:
20 µm
Probing Force:
20 kg
Repeatability:
3.5 µm (Fast Mode), 2.0 µm (Standard Mode), 1.5 µm (Accurate Mode)
Resolution:
0.2 µm
Theta Movement:
7.5 Degree
Theta Stage Accuracy:
2 µm, 3 µm
Theta Stage Repeatabilty:
1.5 µm
Theta Stage Resolution:
0.5 µm
Type:
Automatic
Wafer Size:
200 mm
XY Moving Speed:
Up to 100 mm/sec
Z Repeatability:
1 µm
Z Resolution:
1 µm
Z Travel Area:
35 mm
more info
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FormFactor - TESLA300

Wafer Probe System from FormFactor
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Accuracy:
= 2 µm, = 0.3 µm
Chuck Flatness:
= ± 10 µm
Chuck Size:
300 mm
Net Weight:
47 kg
Operating Temperature:
-60 to 300 Degree C
Overall Dimensions:
1058 x 866 x 25 mm
Planarity:
± 5 µm
Repeatability:
< 1 µm
Resolution:
0.2 µm
Theta Movement:
3.75 Degree
Theta Stage Accuracy:
= 2 µm, = 5 µm
Theta Stage Repeatabilty:
< 1 µm
Theta Stage Resolution:
0.2 µm
Type:
Semi Automatic
Wafer Size:
300 mm
XY Moving Speed:
50 mm/s
Z Accuracy:
= 2 µm
Z Repeatability:
< 1 µm
Z Resolution:
0.2 µm
Z Travel Area:
10 mm
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Instec, Inc - SE-12

Wafer Probe System from Instec, Inc
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Chuck Size:
12 x 12 Inches
Magnification:
16 to 100X, 200X
Net Weight:
180 kg
Overall Dimensions:
1030 x 820 x 730 mm
Platen Travel Size:
50.8 mm
Power Supply:
220V, 50/60 Hz
Probe Rotation:
360 Degree
Resolution:
10 µm
Stage Travel Range Fine:
8 x 8 x 8 mm, 12 x 12 x 12 mm
Type:
Semi Automatic
Wafer Size:
12 Inches
Z Travel Area:
6 mm
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Instec, Inc - SE-4

Wafer Probe System from Instec, Inc
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Chuck Size:
4 x 4 Inches
Magnification:
16 to 100X, 200X
Net Weight:
70 kg
Overall Dimensions:
580 x 620 x 730 mm
Platen Travel Size:
50.8 mm
Power Supply:
220V, 50/60 Hz
Probe Rotation:
360 Degree
Resolution:
10 µm
Stage Travel Range Fine:
8 x 8 x 8 mm, 12 x 12 x 12 mm
Type:
Semi Automatic
Wafer Size:
4 Inches
Z Travel Area:
6 mm
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Instec, Inc - SE-6

Wafer Probe System from Instec, Inc
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Chuck Size:
6 x 6 Inches
Magnification:
16 to 100X, 200X
Net Weight:
80 kg
Overall Dimensions:
640 x 700 x 730 mm
Platen Travel Size:
50.8 mm
Power Supply:
220V, 50/60 Hz
Probe Rotation:
360 Degree
Resolution:
10 µm
Stage Travel Range Fine:
8 x 8 x 8 mm, 12 x 12 x 12 mm
Type:
Semi Automatic
Wafer Size:
6 Inches
Z Travel Area:
6 mm
more info
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Instec, Inc - SE-8

Wafer Probe System from Instec, Inc
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Chuck Size:
8 x 8 Inches
Magnification:
16 to 100X, 200X
Net Weight:
85 kg
Overall Dimensions:
660 x 660 x 700 mm
Platen Travel Size:
50.8 mm
Power Supply:
220V, 50/60 Hz
Probe Rotation:
360 Degree
Resolution:
10 µm
Stage Travel Range Fine:
8 x 8 x 8 mm, 12 x 12 x 12 mm
Type:
Semi Automatic
Wafer Size:
8 Inches
Z Travel Area:
6 mm
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