Wafer Probe System

Download Datasheet Request Information

Select to compare

MPI Corporation - TS2000-DP

Wafer Probe System from MPI Corporation

Download Datasheet Request Information

Accuracy:

4 µm

Chuck Size:

210 X 340 mm

Mounting Movement:

100 x 30 mm

Net Weight:

500 kg

Overall Dimensions:

980 x 1100 x 1650 mm

Planarity:

5 µm

Power Supply:

100-240 V AC 50/60 Hz

Repeatability:

2 µm

Resolution:

1 µm

Theta Movement:

5 Degree

Theta Stage Accuracy:

3.0 µm

Theta Stage Repeatabilty:

2.0 µm

Theta Stage Resolution:

0.0004 Degree

Type:

Automatic

Vacuum:

-0.9 bar

Wafer Size:

200 mm

XY Moving Speed:

100 mm/sec

Z Accuracy:

2 µm

Z Repeatability:

3 µm

Z Resolution:

0.2 µm

Z Travel Area:

10 mm

Download Datasheet Request Information

Select to compare

MPI Corporation - TS2000-HP

Wafer Probe System from MPI Corporation

Download Datasheet Request Information

Accuracy:

2 µm

Chuck Size:

210 x 300 mm

Mounting Movement:

50 x 50 mm

Net Weight:

700 kg

Overall Dimensions:

1420 x 1140 x 1740 mm

Planarity:

5 µm

Power Supply:

100-240 V AC 50/60 Hz

Repeatability:

2 µm

Resolution:

0.5 µm

Theta Movement:

6 Degree

Theta Stage Accuracy:

2.0 µm

Theta Stage Repeatabilty:

1 µm

Theta Stage Resolution:

0.0004 Degree

Type:

Automatic

Vacuum:

-0.9 bar

Wafer Size:

200 mm

XY Moving Speed:

20 mm/sec

Z Accuracy:

2 µm

Z Repeatability:

1 µm

Z Resolution:

0.2 µm

Z Travel Area:

50 mm

Download Datasheet Request Information

Select to compare

MPI Corporation - TS2000-IFE

Wafer Probe System from MPI Corporation

Download Datasheet Request Information

Accuracy:

2 µm

Chuck Size:

220 x 490 mm

Net Weight:

800 kg

Overall Dimensions:

1210 x 1190 x 1570 mm

Planarity:

5 µm

Power Supply:

100-240 V AC 50/60 Hz

Repeatability:

1 µm

Resolution:

0.2 µm

Theta Movement:

5 Degree

Theta Stage Accuracy:

2.0 µm

Theta Stage Repeatabilty:

1 µm

Theta Stage Resolution:

0.0001 Degree

Type:

Automatic

Vacuum:

-0.9 bar

Wafer Size:

Up to 200 mm

XY Moving Speed:

50 mm/sec, 20 mm/sec (Z Stage)

Z Accuracy:

2 µm

Z Repeatability:

1 µm

Z Resolution:

0.2 µm

Z Travel Area:

30 mm

Download Datasheet Request Information

Select to compare

MPI Corporation - TS2000-SE

Wafer Probe System from MPI Corporation

Download Datasheet Request Information

Accuracy:

2 µm

Chuck Size:

210 x 300 mm

Net Weight:

650 kg

Overall Dimensions:

1180 x 970 x 1450 mm

Planarity:

5 µm

Power Supply:

100-240 V AC 50/60 Hz, 460 W

Repeatability:

2 µm

Resolution:

0.5 µm

Theta Movement:

6 Degree

Theta Stage Accuracy:

2.0 µm

Theta Stage Repeatabilty:

1 µm

Theta Stage Resolution:

0.0004 Degree

Type:

Automatic

Vacuum:

-0.9 bar

Wafer Size:

Up to 200 mm

XY Moving Speed:

50 mm/sec, 20 mm/sec (Z Stage)

Z Accuracy:

2 µm

Z Repeatability:

1 µm

Z Resolution:

0.2 µm

Z Travel Area:

50 mm

Download Datasheet Request Information

Select to compare

MPI Corporation - TS2500

Wafer Probe System from MPI Corporation

Download Datasheet Request Information

Accuracy:

4 µm

Chuck Size:

298 x 350 mm

Net Weight:

725 kg

Overall Dimensions:

1350 x 1250 x 1840 mm

Planarity:

5 µm

Power Supply:

100-240 V AC 50/60 Hz, 460 W

Repeatability:

2 µm

Resolution:

0.1 µm

Theta Movement:

5 Degree

Theta Stage Accuracy:

3.0 µm

Theta Stage Resolution:

0.00125 Degree

Type:

Automatic

Vacuum:

-0.9 bar

Wafer Size:

100 mm, 150 mm, 200 mm

Z Repeatability:

1 µm

Z Resolution:

0.2 µm

Z Travel Area:

16 mm

Download Datasheet Request Information

Select to compare

MPI Corporation - TS2500-SE

Wafer Probe System from MPI Corporation

Download Datasheet Request Information

Accuracy:

2 µm

Chuck Size:

220 x 490 mm

Mounting Movement:

50 x 50 mm

Net Weight:

950 kg

Overall Dimensions:

1450 x 1330 x 2465 mm

Planarity:

5 µm

Power Supply:

100-240 V AC 50/60 Hz, 460 W

Repeatability:

1 µm

Resolution:

0.2 µm

Theta Movement:

5 Degree

Theta Stage Accuracy:

2.0 µm

Theta Stage Repeatabilty:

1 µm

Theta Stage Resolution:

0.0001 Degree

Type:

Automatic

Vacuum:

-0.9 bar

Wafer Size:

100 mm, 150 mm, 200 mm

XY Moving Speed:

50 mm/sec

Z Accuracy:

2 µm

Z Repeatability:

1 µm

Z Resolution:

0.2 µm

Z Travel Area:

30 mm

Download Datasheet Request Information

Select to compare

MPI Corporation - TS300

Wafer Probe System from MPI Corporation

Download Datasheet Request Information

Chuck Size:

330 x 395 mm

Net Weight:

95 kg

Overall Dimensions:

870 x 745 x 660 mm

Planarity:

10 µm

Power Supply:

100-240 V AC 50/60 Hz, 460 W

Resolution:

1 µm

Theta Movement:

5 Degree

Theta Stage Resolution:

7.5 x 10-3 gradient

Type:

Manual

Vacuum:

-0.3 bar

Wafer Size:

300 mm

Download Datasheet Request Information

Select to compare

MPI Corporation - TS300-SE

Wafer Probe System from MPI Corporation

Download Datasheet Request Information

Chuck Size:

325 x 325 mm

Mounting Movement:

50 x 50 mm

Net Weight:

600 kg

Overall Dimensions:

1190 x 1155 x 1600 mm

Planarity:

10 µm

Power Supply:

100-240 V AC 50/60 Hz

Resolution:

1 µm

Theta Movement:

5 Degree

Theta Stage Resolution:

7.5 x 10-3 gradient

Type:

Manual

Vacuum:

-0.3 bar

Wafer Size:

310 mm

Z Resolution:

1 µm

Z Travel Area:

5 mm

Download Datasheet Request Information

Select to compare

MPI Corporation - TS3000

Wafer Probe System from MPI Corporation

Download Datasheet Request Information

Accuracy:

2 µm

Chuck Size:

310 x 335 mm

Net Weight:

850 kg

Overall Dimensions:

1400 x 1115 x 1550 mm

Planarity:

5 µm

Power Supply:

100-240 V AC 50/60 Hz, 460 W

Repeatability:

1 µm

Resolution:

0.5 µm

Theta Movement:

5 Degree

Theta Stage Accuracy:

2.0 µm

Theta Stage Repeatabilty:

1 µm

Theta Stage Resolution:

0.0001 Degree

Type:

Automatic

Vacuum:

-0.9 bar

Wafer Size:

Up to 300 mm

XY Moving Speed:

50 mm/sec, 20 mm/sec (Z Stage)

Z Accuracy:

2 µm

Z Repeatability:

1 µm

Z Resolution:

0.2 µm

Z Travel Area:

30 mm

Download Datasheet Request Information

Select to compare

MPI Corporation - TS3000-HP

Wafer Probe System from MPI Corporation

Download Datasheet Request Information

Accuracy:

2 µm

Chuck Size:

310 x 335 mm

Net Weight:

960 kg

Overall Dimensions:

1660 x 1305 x 1720 mm

Planarity:

5 µm

Power Supply:

100-240 V AC 50/60 Hz, 460 W

Resolution:

0.5 µm

Theta Movement:

5 Degree

Theta Stage Accuracy:

2.0 µm

Theta Stage Repeatabilty:

1 µm

Theta Stage Resolution:

0.0001 Degree

Type:

Automatic

Vacuum:

-0.9 bar

XY Moving Speed:

50 mm/sec

Z Accuracy:

2 µm

Z Repeatability:

1 µm

Z Resolution:

0.2 µm

Z Travel Area:

30 mm

Wafer Probe System - Page 7

MPI Corporation - TS2000-DP

MPI Corporation - TS2000-HP

MPI Corporation - TS2000-IFE

MPI Corporation - TS2000-SE

MPI Corporation - TS2500

MPI Corporation - TS2500-SE

MPI Corporation - TS300

MPI Corporation - TS300-SE

MPI Corporation - TS3000

MPI Corporation - TS3000-HP

FiltersReset All

Manufacturers

Type

Quick Links

Popular Categories

Our Network

Looking for a Product or Supplier?

Let us know what you need? We can identify products or connect you with appropriate suppliers.

Successfully Submitted!

Wafer Probe System - Page 7

FiltersReset All

Manufacturers

Type

Quick Links

Popular Categories

Our Network

Looking for a Product or Supplier?

Let us know what you need? We can identify products or connect you with appropriate suppliers.

Successfully Submitted!

Thank You for Subscribing

Create an account

Registered User Benefits

Create an account

Login

Login

Download Media Kit

Download Media Kit

Need Help Finding a Product?