Wafer Probe System - Page 13

124 Wafer Probe System from 18 Manufacturers meet your specification.
Accuracy:
4 µm
Probing Force:
100 kg
Stage Types:
Ball Screw
Type:
Automatic
Wafer Size:
200 mm, 300 mm
Z Accuracy:
5 µm
more info
Accuracy:
2 µm
Probing Force:
60 kg
Stage Types:
Ball Screw
Type:
Automatic
Wafer Size:
100 mm, 125 mm, 150 mm, 200 mm
Z Accuracy:
5 µm
more info
Accuracy:
7 µm
Automatic Alignment Repeatability:
5.0 µm
Caliper Arm Assembly Repeatability:
6.0 µm
Caliper Arm Assembly Resolution:
2.0 µm
Chuck Size:
210 x 210 mm
Net Weight:
400 kg
Overall Dimensions:
1420 x 850 x 1080 mm
Planarity:
8 µm
Power Supply:
100-240 VAC 50/60 Hz auto select 600 VA
Repeatability:
4 µm
Resolution:
1.25 µm
Theta Movement:
8 Degree
Theta Stage Resolution:
0.2 µm
Total Travel:
11.4 mm
Type:
Automatic
Vacuum:
0.5 cfm
Wafer Size:
Up to 450 mm
XY Moving Speed:
100 mm/sec
Z Travel Area:
50 mm
more info
Accuracy:
7 µm
Automatic Alignment Repeatability:
5.0 µm
Caliper Arm Assembly Repeatability:
6.0 µm
Caliper Arm Assembly Resolution:
2.0 µm
Chuck Size:
210 x 210 mm
Net Weight:
400 kg
Overall Dimensions:
1420 x 850 x 1080 mm
Planarity:
8 µm
Power Supply:
100-240 VAC 50/60 Hz auto select 600 VA
Repeatability:
4 µm
Resolution:
1.25 µm
Theta Movement:
8 Degree
Theta Stage Resolution:
0.2 µm
Total Travel:
11.4 mm
Type:
Semi Automatic
Vacuum:
0.5 cfm
Wafer Size:
Up to 200 mm
XY Moving Speed:
100 mm/sec
Z Travel Area:
50 mm
more info

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